000 00360nam a2200145Ia 4500
008 190706s9999 xx 000 0 und d
020 _a1-4377-7873-1
082 _a621.38172 S493
100 _aSESHAN,K
245 0 _aHANDBOOK OF THIN FILM DEPOSITION
250 _a3
260 _aLONDON
_bElsevier
_c2012
300 _axviii+392p.,24x16Cms
942 _cREF
_2DDC
999 _c8564
_d8564