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Micro and Nano Machined Electrometers [electronic resource] / edited by Yong Zhu.

Contributor(s): Zhu, Yong [editor.] | SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Singapore : Springer Nature Singapore : Imprint: Springer, 2020Edition: 1st ed. 2020.Description: V, 220 p. 141 illus., 124 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9789811332470.Subject(s): Electronic circuits | Microtechnology | Microelectromechanical systems | Nanotechnology | Electronic Circuits and Systems | Microsystems and MEMS | NanotechnologyAdditional physical formats: Printed edition:: No title; Printed edition:: No titleDDC classification: 621.3815 Online resources: Click here to access online
Contents:
Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.
In: Springer Nature eBookSummary: This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
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Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

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