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Micro and Nano Fabrication [electronic resource] : Tools and Processes / by Hans H. Gatzen, Volker Saile, J�urg Leuthold.

By: Gatzen, Hans H [author.].
Contributor(s): Saile, Volker [author.] | Leuthold, J�urg [author.] | SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015Description: XXVI, 519 p. 357 illus., 54 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9783662443958.Subject(s): Engineering | Nanotechnology | Manufacturing industries | Machines | Tools | Industrial engineering | Engineering | Nanotechnology and Microengineering | Manufacturing, Machines, Tools | Operating Procedures, Materials TreatmentAdditional physical formats: Printed edition:: No titleDDC classification: 620.5 Online resources: Click here to access online
Contents:
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
In: Springer eBooksSummary: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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